{"product_id":"microsensors-mems-and-smart-devices-isbn-9780471861096","title":"Microsensors, MEMS, and Smart Devices","description":"Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called \"system-on-a-chip\" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.\u003cbr\u003e Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.\u003cbr\u003e Features include:\u003cbr\u003e * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.\u003cbr\u003e * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.\u003cbr\u003e * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.\u003cbr\u003e * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.\u003cbr\u003e * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.\u003cbr\u003e Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.\"Smart Devices\" sind gefragt: Ob es um \"intelligente\" Wandverkleidungen zur Lärmdemmung in Hubschraubern oder um \"sprechende\" Etiketten von Nahrungsmitteln geht, \"mitdenkende\" Geräte könnten uns das Leben in vielen Bereichen erleichtern. Die Autoren dieses Buches beschreiben einerseits die Herstellung intelligenter Sensoren und andererseits deren Verknüpfung mit speziellen Stellgliedern zu mikroelektromechanischen Systemen, von deren Möglichkeiten der Leser einen umfassenden Eindruck erhält.\u003cbr\u003e Introduction\u003cbr\u003e \u003cbr\u003e Electronic Materials and Processing\u003cbr\u003e \u003cbr\u003e MEMS Materials and their Preparation\u003cbr\u003e \u003cbr\u003e Standard Microelectronic Technologies\u003cbr\u003e \u003cbr\u003e Silicon Micromachining:Bulk\u003cbr\u003e \u003cbr\u003e Silicon Micromachining: Surface\u003cbr\u003e \u003cbr\u003e Microstereolithography for MEMS\u003cbr\u003e \u003cbr\u003e Microsensors\u003cbr\u003e \u003cbr\u003e Introduction to SAW Devices\u003cbr\u003e \u003cbr\u003e Surface Acoustic Waves in Solids\u003cbr\u003e \u003cbr\u003e IDT Microsensor Parameter Measurement\u003cbr\u003e \u003cbr\u003e IDT Microsensor Fabrication\u003cbr\u003e \u003cbr\u003e IDT Microsensors\u003cbr\u003e \u003cbr\u003e MEMS-IDT Microsensors\u003cbr\u003e \u003cbr\u003e Smart Sensors and MEMS\u003cbr\u003e \u003cbr\u003e Appendices\u003cbr\u003e \u003cbr\u003e Index \u003cb\u003eJulian W. Gardner\u003c\/b\u003e is the author of \u003ci\u003eMicrosensors, MEMS, and Smart Devices\u003c\/i\u003e, published by Wiley. \u003cp\u003e\u003cb\u003eVijay K. Varadan\u003c\/b\u003e is the author of \u003ci\u003eMicrosensors, MEMS, and Smart Devices\u003c\/i\u003e, published by Wiley.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eOsama O. Awadelkarim\u003c\/b\u003e is the author of \u003ci\u003eMicrosensors, MEMS, and Smart Devices\u003c\/i\u003e, published by Wiley.\u003c\/p\u003e Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called \"system-on-a-chip\" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.\u003cbr\u003e \u003cbr\u003e Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.\u003cbr\u003e \u003cbr\u003e Features include:\u003cbr\u003e * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.\u003cbr\u003e * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.\u003cbr\u003e * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.\u003cbr\u003e * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.\u003cbr\u003e * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.\u003cbr\u003e Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.","brand":"Wiley","offers":[{"title":"Default Title","offer_id":47989622374629,"sku":"NP9780471861096","price":183.95,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1842\/7735\/files\/9780471861096.jpg?v=1761784847","url":"https:\/\/k12savings.com\/products\/microsensors-mems-and-smart-devices-isbn-9780471861096","provider":"K12savings","version":"1.0","type":"link"}