Micro and Smart Systems

Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering. About The Authors

Preface

Acknowledgments

Chapter 1 Introduction

Chapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An Overview

Chapter 3 Micromachining Technologies

Chapter 4 Mechanics Of Slender Solids In Microsystems

Chapter 5 Finite Element Method

Chapter 6 Modeling Of Coupled Electromechanical Systems

Chapter 7 Electronics Circuits And Control For Micro And Smart Systems

Chapter 8 Integration Of Micro And Smart Systems

Chapter 9 Scaling Effects In Microsystems

Chapter 10 Simulation Of Microsystems Using Fea Software

Acronyms

Notation

Glossary

Appendix

Index

Professor G.K. Ananthasuresh is a Professor of Mechanical Engineering in the IISc, Bangalore, India. He has been working in the microsystems area since 1991 with emphasis on modeling and design. Prof. Ananthasuresh has edited the first book on Optimal Synthesis Methods for MEMS.

Professor K.J. Vinoy (B.Tech., Kerala, 1991; M.Tech., Cochin, 1992; PhD, Pennsylvania State 2002) is an Associate Professor in the Department of Electrical Communication Engineering at the IISc, Bangalore. This is his third book in the area of Microsystems.

Professor S. Gopalakrishnan is a Professor in the Department of Aerospace Engineering at IISc. He is a Fellow of INAE. Prof. Gopalakrishnan is the Chairman of the Aerospace Applications and Structural Health Monitoring group of the National Programme on Micro and Smart Systems.

Professor K.N. Bhat was a professor at IIT Madras and is currently a Visiting Professor at IISc. He is a Fellow of the INAE. He has immensely contributed to the growth of VLSI and MEMS technology, Education and Manpower development in India.

Professor V.K. Aatre was the Director General of DRDO and Scientific Adviser to the Defence Minister, Government of India. He is a Fellow of IEEE and INAE and is a recipient of the prestigious Padma Bhushan Award in India. He initiated two national programmes on Micro and Smart Systems founded the Institute of Smart Structures and Systems (ISSS).