{"product_id":"microstereolithography-and-other-fabrication-techniques-for-3d-mems-isbn-9780471521853","title":"Microstereolithography and other Fabrication Techniques for 3D MEMS","description":"This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS.\u003cbr\u003e \u003cbr\u003e This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields.\u003cbr\u003e \u003cbr\u003e It provides:\u003cbr\u003e * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques\u003cbr\u003e * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units\u003cbr\u003e * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding\u003cbr\u003e * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers\u003cbr\u003e This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.Eine moderne Einführung in das relativ junge Gebiet der Erzeugung winziger Strukturen, die insbesondere zur Herstellung von Mikrosensoren, Schrittmotoren und miniaturisierten Signalverarbeitungseinheiten benötigt werden. Besprochen wird eine ganze Palette von Mikrofertigungstechniken wie Laserablation und LIGA. Angesprochen werden dabei auch modernste Anwendungsgebiete wie organische Dünnschichttransistoren (TFTs), Antennen, drahtlose Telemetriesysteme und Systeme zur Signalweiterleitung. Preface.\u003cbr\u003e \u003cbr\u003e Microelectromechanical Systems.\u003cbr\u003e \u003cbr\u003e Fundamentals of Polymer Synthesis for MEMS.\u003cbr\u003e \u003cbr\u003e Stereolithography (SL).\u003cbr\u003e \u003cbr\u003e Microstereolithography Techniques I-Scanning Method.\u003cbr\u003e Microstereolithography Techniques II-Projection Method.\u003cbr\u003e \u003cbr\u003e Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.\u003cbr\u003e \u003cbr\u003e Combined Silicon and Polymeric Structures.\u003cbr\u003e Micromolding.\u003cbr\u003e Applications.\u003cbr\u003e \u003cbr\u003e Appendix 1: Some Polymers for MEMS.\u003cbr\u003e Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.\u003cbr\u003e \u003cbr\u003e Index. \"This book gives a fascinating introduction to the subject, and places it superbly within its context....It is original, timely and well written.\" (Engineering Science \u0026amp; Education Jnl. April 2002)  \u003cp\u003e\u003cstrong\u003eVijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USA\u003c\/strong\u003e\u003cbr\u003eVijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, \u003cem\u003eSmart Material Systems and MEMS\u003c\/em\u003e, is due to publish later this year, and he has previously co-authored \u003cem\u003eMicrowave Electronics\u003c\/em\u003e, \u003cem\u003eRF MEMS and their Applications\u003c\/em\u003e, \u003cem\u003eMicrosensors, MEMS and Smart Devices\u003c\/em\u003e and \u003cem\u003eMicrostereolithography and other Fabrication Techniques for 3D MEMS\u003c\/em\u003e. He is also Editor-in-Chief of the SPIE's \u003cem\u003eJournal of Smart Materials and Structures\u003c\/em\u003e.  The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS.\u003cbr\u003e * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques\u003cbr\u003e * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units.\u003cbr\u003e * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding.\u003cbr\u003e * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers\u003cbr\u003e Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.\u003c\/p\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":47989623980261,"sku":"NP9780471521853","price":283.95,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1842\/7735\/files\/9780471521853.jpg?v=1761784852","url":"https:\/\/k12savings.com\/es\/products\/microstereolithography-and-other-fabrication-techniques-for-3d-mems-isbn-9780471521853","provider":"K12savings","version":"1.0","type":"link"}