{"product_id":"micro-electromechanical-systems-mems-isbn-9781394229833","title":"Micro Electromechanical Systems (MEMS)","description":"\u003cp\u003e\u003cb\u003ePractical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices\u003c\/b\u003e \u003c\/p\u003e\u003cp\u003e\u003ci\u003eMicro Electromechanical Systems (MEMS)\u003c\/i\u003e is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications. \u003c\/p\u003e\u003cp\u003eThe book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject. \u003c\/p\u003e\u003cp\u003eThe book covers additional topics such as: \u003c\/p\u003e\u003cul\u003e\n\u003cli\u003eBasic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation\u003c\/li\u003e\n\u003cli\u003eSimulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing\u003c\/li\u003e\n\u003cli\u003eX-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy \u003c\/li\u003e\n\u003cli\u003eExperimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field\u003c\/li\u003e\n\u003c\/ul\u003e \u003cp\u003eA practical guidebook on the subject, \u003ci\u003eMicro Electromechanical Systems (MEMS)\u003c\/i\u003e is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time. \u003c\/p\u003e\u003cp\u003eAbout the Editor xv\u003c\/p\u003e \u003cp\u003eList of Contributors xvii\u003c\/p\u003e \u003cp\u003ePreface xxi\u003c\/p\u003e \u003cp\u003eAbout the Companion Website xxix\u003c\/p\u003e \u003cp\u003e\u003cb\u003e1 Multiphysics Simulations on the Effect of Fluidic Concentration Profiles Over Y-Channel and T-Channel Designs 1\u003c\/b\u003e\u003cbr\u003e \u003ci\u003ePavar Sai Kumar and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e1.1 Introduction 1\u003c\/p\u003e \u003cp\u003e1.2 Real-Time Applications of This Study 2\u003c\/p\u003e \u003cp\u003e1.3 Simulation Section 2\u003c\/p\u003e \u003cp\u003e1.4 Results and Discussions 3\u003c\/p\u003e \u003cp\u003e1.5 Conclusion 10\u003c\/p\u003e \u003cp\u003eReferences 10\u003c\/p\u003e \u003cp\u003e\u003cb\u003e2 Droplet Generation in T-Junction Microchannel Using Multiphysics Software 13\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eAbhishek Kumar and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e2.1 Introduction 13\u003c\/p\u003e \u003cp\u003e2.2 Simulation Section 15\u003c\/p\u003e \u003cp\u003e2.3 Result and Discussion 17\u003c\/p\u003e \u003cp\u003e2.4 Conclusion 17\u003c\/p\u003e \u003cp\u003eReferences 18\u003c\/p\u003e \u003cp\u003e\u003cb\u003e3 Cleanroom-Assisted and Cleanroom-Free Photolithography 21\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eAbhishesh Pal, Satish Kumar Dubey, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e3.1 Introduction 21\u003c\/p\u003e \u003cp\u003e3.2 Photolithography Basics, Classification and Applications 22\u003c\/p\u003e \u003cp\u003e3.3 Experimental Section on Designing and Development of Features Using Photolithography 25\u003c\/p\u003e \u003cp\u003e3.4 Conclusion 26\u003c\/p\u003e \u003cp\u003eReferences 27\u003c\/p\u003e \u003cp\u003e\u003cb\u003e4 Additive Manufacturing (3D Printing) 29\u003cbr\u003e \u003c\/b\u003e\u003ci\u003ePavar Sai Kumar, Abhishek Kumar, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e4.1 Stereolithography (SLA) Printing of Y-Channeled Microfluidic Chip 29\u003c\/p\u003e \u003cp\u003e4.2 Fused Deposition Modeling (FDM): Fabrication of Single Electrode Electrochemiluminescence Device 34\u003c\/p\u003e \u003cp\u003eReferences 37\u003c\/p\u003e \u003cp\u003e\u003cb\u003e5 Laser Processing 41\u003cbr\u003e \u003c\/b\u003e\u003ci\u003ePavar Sai Kumar, Abhishek Kumar, Manish Bhaiyya, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e5.1 CO 2 Laser for Electrochemical Sensor Fabrication 41\u003c\/p\u003e \u003cp\u003e5.2 One-Step Production of Reduced Graphene Oxide from Paper via 450 nm Laser Ablations 45\u003c\/p\u003e \u003cp\u003e5.3 Conclusion 50\u003c\/p\u003e \u003cp\u003eReferences 50\u003c\/p\u003e \u003cp\u003e\u003cb\u003e6 Soft Lithography: DLW-Based Microfluidic Device Fabrication 53\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eK. Ramya and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e6.1 Introduction 53\u003c\/p\u003e \u003cp\u003e6.2 Designing Section 54\u003c\/p\u003e \u003cp\u003e6.3 Conclusion 57\u003c\/p\u003e \u003cp\u003eReferences 57\u003c\/p\u003e \u003cp\u003e\u003cb\u003e7 Electrode Fabrication Techniques 59\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eSanjeet Kumar, Abhishek Kumar, K.S. Deepak, Manish Bhaiyya, Aniket Balapure, Satish Kumar Dubey, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e7.1 Inkjet Printing Technique: Electrode Fabrication for Advanced Applications 59\u003c\/p\u003e \u003cp\u003e7.2 Screen Printing Technique for Electrochemical Sensor Fabrication 62\u003c\/p\u003e \u003cp\u003e7.3 Physical Vapor Deposition (PVD) Technique for Electrode Fabrication 66\u003c\/p\u003e \u003cp\u003e7.4 Conclusion 69\u003c\/p\u003e \u003cp\u003eReferences 69\u003c\/p\u003e \u003cp\u003e\u003cb\u003e8 Morphological Characterization 71\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eDhoni Nagaraj, Yuvraj Maphrio Mao, Parvathy Nair, Sanjeet Kumar, Imran Khan, Amreen Khairunnisa, R.N. Ponnalagu, Satish Kumar Dubey, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e8.1 Morphological Studies with Different Techniques 71\u003c\/p\u003e \u003cp\u003e8.2 Scanning Electron Microscopy 71\u003c\/p\u003e \u003cp\u003e8.3 Steps Involved in the Scanning Electron Microscope Characterization 72\u003c\/p\u003e \u003cp\u003e8.4 X-Ray Diffraction (XRD) 74\u003c\/p\u003e \u003cp\u003e8.5 Optical LED Microscope 79\u003c\/p\u003e \u003cp\u003e8.6 Contact Angle 83\u003c\/p\u003e \u003cp\u003eReferences 87\u003c\/p\u003e \u003cp\u003e\u003cb\u003e9 Spectroscopic Characterization 89\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eHimanshi Awasthi, N.K. Nishchitha, Sonal Fande, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e9.1 Introduction 89\u003c\/p\u003e \u003cp\u003e9.2 Ultraviolet-Visible (UV-Vis) Spectrophotometers 90\u003c\/p\u003e \u003cp\u003e9.3 X-Ray Photoelectron Spectroscopy (XPS) 92\u003c\/p\u003e \u003cp\u003e9.4 Raman Spectroscopy 97\u003c\/p\u003e \u003cp\u003e9.5 Fourier Transform Infrared (FTIR) Spectroscopy 100\u003c\/p\u003e \u003cp\u003eReferences 104\u003c\/p\u003e \u003cp\u003e\u003cb\u003e10 Microfluidic Devices 105\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eAbhishesh Pal, Pavar Sai Kumar, Sreerama Amrutha Lahari, Sonal Fande, Abhishek Kumar, Manish Bhaiyya, Sohan Dudala, R.N. Ponnalagu, Satish Kumar Dubey, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e10.1 Electrochemical Detection of Bacteria, Biomarkers, Biochemical, and Environmental Pollutants 105\u003c\/p\u003e \u003cp\u003e10.2 Microfluidics Integrated Electrochemiluminescence System for Hydrogen Peroxide Detection 114\u003c\/p\u003e \u003cp\u003e10.3 Development of Microfluidic Chip for Colorimetric Analysis 118\u003c\/p\u003e \u003cp\u003e10.4 Development of Disposable and Eco-Friendly μPADs as Chemiluminescence Substrates 123\u003c\/p\u003e \u003cp\u003e10.5 Microfluidic Devices for Polymerase Chain Reaction (PCR) 128\u003c\/p\u003e \u003cp\u003eReferences 131\u003c\/p\u003e \u003cp\u003e\u003cb\u003e11 Wearable Devices 135\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eRamya Priya Pujari, S. Vanmathi, Satish Kumar Dubey, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e11.1 Application of Laser-Induced Graphene in Breath Analysis 135\u003c\/p\u003e \u003cp\u003e11.2 Wearable Microfluidic Device for Nucleic Acid Amplification 138\u003c\/p\u003e \u003cp\u003e11.3 Wearable Patch Biofuel Cell 142\u003c\/p\u003e \u003cp\u003eReferences 145\u003c\/p\u003e \u003cp\u003e\u003cb\u003e12 Energy Devices 147\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eHimanshi Awasthi, S. Vanmathi, and Sanket Goel\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003e12.1 Introduction 147\u003c\/p\u003e \u003cp\u003e12.2 Enzymatic Biofuel Cells and Microbial Fuel Cells 150\u003c\/p\u003e \u003cp\u003e12.3 Microbial Fuel Cells (MFCs) 153\u003c\/p\u003e \u003cp\u003e12.4 Electrochemical Characterization of Supercapacitor Energy Devices 156\u003c\/p\u003e \u003cp\u003eReferences 160\u003c\/p\u003e \u003cp\u003e\u003cb\u003e13 Conclusion and Future Outlook 163\u003cbr\u003e \u003c\/b\u003e\u003ci\u003eAmreen Khairunnisa\u003c\/i\u003e\u003c\/p\u003e \u003cp\u003eIndex 165\u003c\/p\u003e  \u003cp\u003e\u003cb\u003eSANKET GOEL, P\u003csmall\u003eH\u003c\/small\u003e.D.,\u003c\/b\u003e is a Professor with the Department of Electrical and Electronics Engineering and Principal Investigator with the MEMS, Microfluidics and Nanoelectronics (MMNE) Lab at BITS Pilani, Hyderabad Campus, Hyderabad, India.   \u003c\/p\u003e\u003cp\u003e\u003cb\u003ePractical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices\u003c\/b\u003e \u003c\/p\u003e\u003cp\u003e\u003ci\u003eMicro Electromechanical Systems (MEMS)\u003c\/i\u003e is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications. \u003c\/p\u003e\u003cp\u003eThe book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject. \u003c\/p\u003e\u003cp\u003eThe book covers additional topics such as: \u003c\/p\u003e\u003cul\u003e\n\u003cli\u003eBasic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation\u003c\/li\u003e\n\u003cli\u003eSimulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing\u003c\/li\u003e\n\u003cli\u003eX-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy \u003c\/li\u003e\n\u003cli\u003eExperimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field\u003c\/li\u003e\n\u003c\/ul\u003e \u003cp\u003eA practical guidebook on the subject, \u003ci\u003eMicro Electromechanical Systems (MEMS)\u003c\/i\u003e is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.\u003c\/p\u003e","brand":"Wiley-IEEE Press","offers":[{"title":"Default Title","offer_id":47989617754341,"sku":"NP9781394229833","price":110.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1842\/7735\/files\/9781394229833.jpg?v=1761784828","url":"https:\/\/k12savings.com\/es\/products\/micro-electromechanical-systems-mems-isbn-9781394229833","provider":"K12savings","version":"1.0","type":"link"}