{"product_id":"introduction-to-microfabrication-isbn-9780470749838","title":"Introduction to Microfabrication","description":"This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.  \u003cp\u003eThis \u003ci\u003esecond edition\u003c\/i\u003e includes:\u003c\/p\u003e \u003cul\u003e \u003cli\u003eexpanded sections on MEMS and microfluidics related fabrication issues\u003c\/li\u003e \u003cli\u003enew chapters on polymer and glass microprocessing, as well as serial processing techniques\u003c\/li\u003e \u003cli\u003e200 completely new and 200 modified figures\u003c\/li\u003e \u003cli\u003emore coverage of imprinting techniques, process integration and economics of microfabrication\u003c\/li\u003e \u003cli\u003e300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems\u003c\/li\u003e \u003cli\u003esolutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book\u003c\/li\u003e \u003c\/ul\u003e \u003cp\u003eWith clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.\u003c\/p\u003e \u003cp\u003e\u003ca href=\"http:\/\/www.wiley.com\/go\/Franssila_Micro2e\"\u003ewww.wiley.com\/go\/Franssila_Micro2e\u003c\/a\u003e\u003c\/p\u003e  Preface to the First Edition.  \u003cp\u003ePreface to the Second Edition.\u003c\/p\u003e \u003cp\u003eAcknowledgements.\u003c\/p\u003e \u003cp\u003e1 Introduction.\u003c\/p\u003e \u003cp\u003eCharacterization.\u003c\/p\u003e \u003cp\u003e3 Simulation of Microfabrication Processes.\u003c\/p\u003e \u003cp\u003e4 Silicon.\u003c\/p\u003e \u003cp\u003e5 Thin-Film Materials and Processes.\u003c\/p\u003e \u003cp\u003e6 Epitaxy.\u003c\/p\u003e \u003cp\u003e7 Advanced Thin Films.\u003c\/p\u003e \u003cp\u003e8 Pattern Generation.\u003c\/p\u003e \u003cp\u003e9 Optical Lithography.\u003c\/p\u003e \u003cp\u003e10 Advanced Lithography.\u003c\/p\u003e \u003cp\u003e11 Etching.\u003c\/p\u003e \u003cp\u003e12 Wafer Cleaning and Surface Preparation.\u003c\/p\u003e \u003cp\u003e13 Thermal Oxidation.\u003c\/p\u003e \u003cp\u003e14 Diffusion.\u003c\/p\u003e \u003cp\u003e15 Ion Implantation.\u003c\/p\u003e \u003cp\u003e16 CMP: Chemical–Mechanical Polishing.\u003c\/p\u003e \u003cp\u003e17 Bonding.\u003c\/p\u003e \u003cp\u003e18 Polymer Microprocessing.\u003c\/p\u003e \u003cp\u003e19 Glass Microprocessing.\u003c\/p\u003e \u003cp\u003e20 Anisotropic Wet Etching.\u003c\/p\u003e \u003cp\u003e21 Deep Reactive Ion Etching.\u003c\/p\u003e \u003cp\u003e22 Wafer Engineering.\u003c\/p\u003e \u003cp\u003e23 Special Processes and Materials.\u003c\/p\u003e \u003cp\u003e24 Serial Microprocessing.\u003c\/p\u003e \u003cp\u003e25 Process Integration.\u003c\/p\u003e \u003cp\u003e26 MOS Transistor Fabrication.\u003c\/p\u003e \u003cp\u003e27 Bipolar Transistors.\u003c\/p\u003e \u003cp\u003e28 Multilevel Metallization.\u003c\/p\u003e \u003cp\u003e29 Surface Micromachining.\u003c\/p\u003e \u003cp\u003e30 MEMS Process Integration.\u003c\/p\u003e \u003cp\u003e31 Process Equipment.\u003c\/p\u003e \u003cp\u003e32 Equipment for Hot Processes.\u003c\/p\u003e \u003cp\u003e33 Vacuum and Plasmas.\u003c\/p\u003e \u003cp\u003e34 CVD and Epitaxy Equipment.\u003c\/p\u003e \u003cp\u003e35 Cleanrooms.\u003c\/p\u003e \u003cp\u003e36 Yield and Reliability.\u003c\/p\u003e \u003cp\u003e37 Economics of Microfabrication.\u003c\/p\u003e \u003cp\u003e38 Moore's Law and Scaling Trends.\u003c\/p\u003e \u003cp\u003e39 Microfabrication at Large.\u003c\/p\u003e \u003cp\u003eAppendix A Properties of Silicon.\u003c\/p\u003e \u003cp\u003eAppendix B Constants and Conversion Factors.\u003c\/p\u003e \u003cp\u003eAppendix C Oxide and Nitride Thickness by Color.\u003c\/p\u003e \u003cp\u003eIndex.\u003c\/p\u003e  \u003cb\u003eProfessor Sami Franssila, Helsinki University of Technology, Finland\u003c\/b\u003e\u003cbr\u003e Sami Franssila has taught courses on microfluidics, bioMEMs, microsystems, nanoscience, silicon microtechnology and thin-film technology at Helsinki University of Technology since 1998. He is group leader of the Microfabrication group at Micronova, the Centre for Micro and Nanotechnology which is run jointly by the VTT Technical Research Centre of Finland and Helsinki University of Technology.\u003cbr\u003e Professor Franssila researches into micro- and nanofabrication for fluidic, chemical and biological devices, chemical microsystems and thin film technology.\u003cbr\u003e He has authored or co-authored over 60 peer reviewed articles, 120 international conference papers and written one textbook \u003ci\u003eIntroduction to Microfabrication\u003c\/i\u003e, published by John Wiley \u0026amp; Sons in 2004.  This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.  \u003cp\u003eThis second edition includes:\u003c\/p\u003e \u003cul\u003e \u003cli\u003eexpanded sections on MEMS and microfluidics related fabrication issues\u003c\/li\u003e \u003cli\u003enew chapters on polymer and glass microprocessing, as well as serial processing techniques\u003c\/li\u003e \u003cli\u003e200 completely new and 200 modified figures\u003c\/li\u003e \u003cli\u003emore coverage of imprinting techniques, process integration and economics of microfabrication\u003c\/li\u003e \u003c\/ul\u003e \u003cul\u003e \u003cli\u003e300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems\u003c\/li\u003e \u003cli\u003esolutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book\u003c\/li\u003e \u003c\/ul\u003e \u003cp\u003eWith clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.\u003c\/p\u003e \u003cp\u003ewww.wiley.com\/go\/Franssila_Micro2e\u003c\/p\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":47989462663397,"sku":"NP9780470749838","price":99.95,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1842\/7735\/files\/9780470749838.jpg?v=1761784198","url":"https:\/\/k12savings.com\/es\/products\/introduction-to-microfabrication-isbn-9780470749838","provider":"K12savings","version":"1.0","type":"link"}