{"product_id":"euv-lithography-isbn-9780470471555","title":"EUV Lithography","description":"EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field. 1. EUV Lithography: A Historical Perspective \/ Hiroo Kinoshita and Obert Wood \u003cp\u003e2. EUV LLC: An Historical Perspective \/ Chuck Gwyn and Stefan Wurm\u003c\/p\u003e \u003cp\u003e3. EUV Source Technology \/ Vivek Bakshi\u003c\/p\u003e \u003cp\u003e4A. Optics and Multilayer Coatings for EUVL Systems \/ Regina Soufli, Saša Bajt, Russell M. Hudyma and John S. Taylor\u003c\/p\u003e \u003cp\u003e4B. Projection Systems for Extreme Ultraviolet Lithography \/ Russell M. Hudyma and Regina Soufli\u003c\/p\u003e \u003cp\u003e4C. Specification, Fabrication, Testing, and Mounting of EUVL Optical Substrates \/ John S. Taylor and Regina Soufli\u003c\/p\u003e \u003cp\u003e4D. Multilayer Coatings for EUVL \/ Regina Soufli and Saša Bajt\u003c\/p\u003e \u003cp\u003e5. EUV Optical Testing \/ Kenneth A. Goldberg\u003c\/p\u003e \u003cp\u003e6A. Optics Contamination \/ Saša Bajt\u003c\/p\u003e \u003cp\u003e6B. Grazing Angle Collector Contamination \/ Valentino Rigato\u003c\/p\u003e \u003cp\u003e6C. Normal Incidence (Multilayer) Collector Contamination \/ David N. Ruzic and Shailendra N. Srivastava\u003c\/p\u003e \u003cp\u003e7. EUV Mask and Mask Metrology \/ Han-Ku Cho and Jinho Ahn\u003c\/p\u003e \u003cp\u003e8. Photoresists for Extreme Ultraviolet Lithography \/ Robert L. Brainard\u003c\/p\u003e \u003cp\u003e9. High-Resolution EUV Imaging Tools for Resist Exposure and Aerial Image Monitoring \/ Malcolm Gower\u003c\/p\u003e \u003cp\u003e10. Fundamentals of the EUVL Scanner \/ Kazuya Ota\u003c\/p\u003e \u003cp\u003e11. EUVL System Patterning Performance \/ Patrick Naulleau, John E. Bjorkholm, and Manish Chandhok\u003c\/p\u003e \u003cp\u003e12. Lithography Cost of Ownership \/ Phil Seidel\u003c\/p\u003e \u003cp\u003eAppendix: Example Case Studies of Lithography CoO Calculations\u003c\/p\u003e  \u003cp\u003e\u003cstrong\u003eVivek Bakshi\u003c\/strong\u003e is the President of EUV Litho, Inc. He was previously a senior member of the technical staff of Sematech, Inc.\u003cbr\u003eDr. Bakshi studied at the University of Texas at Austin; the University of Idaho; and the Indian Institute of Technology at Kanpur.\u003c\/p\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":47989172502757,"sku":"NP9780470471555","price":146.95,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1842\/7735\/files\/9780470471555.jpg?v=1761783082","url":"https:\/\/k12savings.com\/es\/products\/euv-lithography-isbn-9780470471555","provider":"K12savings","version":"1.0","type":"link"}