Micro-Manufacturing

This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.

Foreword vii

Contributors ix

1 Fundamentals of Micro-Manufacturing 1

2 Micro-Fabrication Processes in Semiconductor Industry 25

3 Modeling and Analysis at Micro-Scales 43

4 Metrology, Inspection, and Process Control in Micro-Scales 71

5 Micro-Layered Manufacturing 97

6 Micro-Laser Processing 159

7 Polymer Micro-Molding/Forming Processes 197

8 Mechanical Micro-Machining 235

9 Micro-Forming 275

10 Micro-Electro Discharge Machining (μEDM) 301

11 Metal Injection Molding at Micro-Scales (μMIM) 347

Index 371

Muammer Koç, PhD, is the Director of National Science Foundation (NSF)-Industry/University Cooperative Research Center (I/UCRC) on Precision Forming (CPF), Associate Professor in the Department of Mechanical Engineering at Virginia Commonwealth University; and Associate Professor of Department of Industrial Engineering at Istanbul Sehir University. His research interests include manufacturing processes and systems, micro-manufacturing, design of nano/micro-scale functional surface structures, and product innovation.

Tuğrul Özel, PhD, is the Director of Manufacturing Automation Research Laboratory and Associate Professor in the Department of Industrial and Systems Engineering at Rutgers University in New Jersey. His research interests include manufacturing processes and automated systems, computational modeling of machining processes, laser-based micro/nano processing, and design and manufacturing of micro-products.

The first-of-its-kind guide to metal-based micro-manufacturing processes

With consumer products and industrial applications evolving toward smaller integrated devices with multi-functionalities, scientists and engineers in modeling, design, and manufacturing are increasingly expected to have a thorough understanding of materials behavior at micro-scales under various processing conditions such as cutting and deformation.

This book offers for the first time complete, practical guidance on all aspects of micro-scale manufacturing for non-silicon materials, including thorough discussions of the latest developments and findings in the field. Comprised of contributions by highly regarded experts from around the world, Micro-Manufacturing examines the design, material selection, and manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. Numerous examples of applications, from smart phones and cameras to sensors and medical devices, are also included throughout.

Readers will find a wealth of information about techniques, materials behavior, and processes, including:

• How to adapt proven micro-fabrication approaches for use with metal components

• Questions of materials response at micro-scales and various limitations

• How the different modeling approaches in micro-manufacturing compare

• Metrology, inspection, and quality-control issues at micro-scales

• Micro-layered manufacturing processes for products made of metal or plastic

• Micro-forming, micro-machining, micro-molding, micro-laser, micro-joining, and micro-assembly processes

• Micro-EDM processes and related aspects of equipment development