RF MEMS and Their Applications

Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities.
* Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors
* Includes coverage of MEMS devices for wireless and Bluetooth enabled systems
Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.Unter mikroelektromechanischen Systemen (MEMS) versteht man Anordnungen von Sensoren und Aktuatoren, die durch Mikroschaltkreise gesteuert werden und auf Änderungen der Umgebungsbedingungen reagieren können. Die Integration von MEMS in traditionelle Hochfrequenzschaltkreise führte zu flexiblen, hochleistungsfähigen, dabei aber preiswerten Systemen. Diesem ausgesprochen interdisziplinär angelegten Buch entnehmen Sie die aktuellsten Erkenntnisse auf diesem zunehmend wichtigen Gebiet. Besprochen werden auch Anwendungen von MEMS in drahtlosen und Bluetooth-fähigen Systemen. Preface.

Microelectromechanical Systems (MEMS) and Radio Frequency MEMS.

MEMS Materials and Fabrication Techniques.

RF MEMS Switches and Micro Relays.

MEMS Inductors and Capacitors.

Micromachined RF Filters.

Micromachined Phase Shifters.

Micromachined Transmission Lines and Components.

Micromachined Antennae.

Integration and Packaging for RF MEMS Devices.

Index.

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USA
Vijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA. Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

K. J. Vinoy is an Assistant Professor in the Department of Electrical Communication Engineering at the Indian Institute of Science, Bangalore, India. He received an M.Tech degree in Electronics from the Cochin University of Science and Technology, India and a Ph.D. degree in Engineering Science and Mechanics from the Pennsylvania State University, USA, in 1993 and 2002, respectively. From 1994 to 1998, he worked at the National Aerospace Laboratories, Bangalore, India. Following this, he was a research assistant at the Center for the Engineering of Electronic and Acoustic Materials and Devices (CEEAMD) at the Pennsylvania State University from 1999 to 2002. He continued there to carry out postdoctoral research from 2002 to August 2003. His research interests include several aspects of microwave engineering, RF-MEMS and smart material systems. He has published over 50 papers in technical journals and conference proceedings. His other publications include two books, namely Radar Absorbing Materials: From Theory to Design and Characterization, and RF-MEMS and their Applications. He also holds one US patent.

K. A. Jose is the author of RF MEMS and Their Applications, published by Wiley.

The growing requirement for wireless devices with increased functionality and reduced power consumption is driving the development of new RF micro-electro-mechanical systems (RF MEMS).

RF MEMS and their Applications sets out to address an increasing need for information by providing a vital overview of this emerging field.

This book:
* Presents an accessible review of MEMS devices and fabrication techniques.

* Discusses the development of RF MEMS switches and the attempts to reduce their actuation voltage.

* Outlines the design and development of RF MEMS based inductors, capacitors, filters and phase shifters.

* Covers the technology behind micromachined antennas.

* Describes integration and packaging techniques for RF MEMS devices.
Offering readers a guide to the development of RF MEMS components and systems, this unique reference will appeal to RF and microwave engineers and MEMS experts alike. Graduate students and researchers in the telecommunications and microelectronics field will profit from the detailed overview of current microfabrication techniques. Materials technologists and physicists working in industrial and academic research & development will also find this a valuable reference.