Semiconductor Sensors

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends. Classification and Terminology of Sensors (S. Sze).

Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).

Acoustic Sensors (M. Motamedi & R. White).

Mechanical Sensors (B. Kloeck & N. de Rooij).

Magnetic Sensors (H. Baltes & R. Castagnetti).

Radiation Sensors (S. Audet & J. Steigerwald).

Thermal Sensors (S. Van Herwaarden & G. Meijer).

Chemical Sensors (S. Morrison).

Biosensors (A. Dewa & W. Ko).

Integrated Sensors (K. Najafi, et al.).

Appendices.

Index. S. M. SZE, PhD, is UMC Chair Professor in the Electronics Engineering Department at the National Chiao Tung University. His previous books include Semiconductor Devices; Physics of Semiconductor Devices, Second Edition; High-Speed Semiconductor Devices; and Semiconductor Sensors, all available from Wiley.